Eshboltayev Iqbol Mamirjonovich, G‘ofurov Saidkamol Zokirjon ogli, Eshboltayev Ikromjon Iqbol ogli. OBTAINING AND MODELING NANO-SCALE STRUCTURES IN SEMICONDUCTORS . journal. 2025;59(5):13-15. Accessed January 20, 2026. https://journalss.org/index.php/tal/article/view/12517